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Feed Back Scale / Actuator / Precision Positioning Stage

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Technical Information

Feed back scale

Feed back scale table for serial communication

Scale Type Partner Series Resolution*1
[μm]
Max. rate*1
[m/s]
Parallel Type
(A/B/Z phase)
General
Maximum speed after4× multiplication :
4 Mpps
Serial
communication
(Absolute)
FAGOR AUTOMATION
S2AP/SV2AP/G2AP
0.01/0.05
3
LAP
0.01/0.05
3
EXA/ EXG/ EXT
0.01/0.05
8
H2AP-D200/H2AP-D90
29 bit/23 bit
750 rpm/1500 rpm
S2AP-D170,/S2AP-D90
23 bit
1500 rpm
HEIDENHAIN
LIC 2197P/LIC 2199P
0.05/0.1
10
LIC 4193P/LIC 4195P
LIC 4197P/LIC 4199P
0.001/0.005/0.01
10
LC 195P/LC 495P
0.001/0.01
3
ECA 4490P
27 bits to 29 bits
7000 rpm〜550 rpm
(Depends on drum size)
RCN 2x90P/RCN 5x90P
26 bits/28 bits
1500 rpm
RCN 8x90P
29 bit
500 rpm
RSF Electronik
MC 15P MP/MC 15P MK
0.05/0.1
10
Magnescale Co.,Ltd.
SR77
0.01 to 1
3.3
SR87
0.01 to 1
3.3
MITSUBISHI HEAVY
INDUSTRIES MACHINE TOOL CO., LTD
MPZA/MPRZ
23 bits
10000 r/min,
5000 r/min
Mitutoyo Corporation
AT573-SC/AT573-H
0.05
2.5
ST700
0.1
5
ST1300
0.001/0.01
8
Renishaw plc
RESOLUTE
0.001
A5/0.4, A6/4
0.05
A5/20, A6/100
0.1
A5/40, A6/100
Serial
communication
(Incremental)
Magnescale Co., Ltd.
SL700+PL101RP/RHP
0.1
10
SL710+PL101RP/RHP
0.1
10
SR75/SR85
0.01 to 1
3.3
BF1
0.001/0.01
0.4/1.8
SQ10+PQ11
0.05/0.1/0.5/1
3
SQ10+PQ10+MQ10
0.05/0.1/0.5/1
3
MITSUBISHI HEAVY
INDUSTRIES MACHINE TOOL CO., LTD
MPLIN
0.1
30
Nidec Sankyo Corporation
PSLH041+PSLG
0.1
6
Renishaw plc
TONiC
0.001 to 5
6.48 m/s @ 1 μm
0.648 m/s @ 0.1 μm
ATOM
0.001 to 10
VIONIC
0.0025 to 5
*1 There is the difference of resolution and maximum rate from the specification by original supplier as per the servo driver limitation of maximum pulse frequency. The maximum pulse frequency is 400 Mpps for A5 family and 4 Gpps for A6 series. We show the value of A6 family on this table.
   

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Feed back scale application example

Full Closed Control Linear type application example
Full Closed Control Rotary type application example
Linear Motor Control Linear Type application example
DD Motor Control Rotary type application example

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