Feed Back Scale / Actuator / Precision Positioning Stage

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Technical Information

Scale Type	Partner	Series	Resolution^*1 [μm]	Max. rate^*1 [m/s]
Parallel Type (A/B/Z phase)	General	—	Maximum speed after4× multiplication : 4 Mpps
Serial communication (Absolute)	FAGOR AUTOMATION	S2AP/SV2AP/G2AP	0.01/0.05	3
		LAP	0.01/0.05	3
		EXA/ EXG/ EXT	0.01/0.05	8
		H2AP-D200/H2AP-D90	29 bit/23 bit	750 rpm/1500 rpm
		S2AP-D170,/S2AP-D90	23 bit	1500 rpm
	HEIDENHAIN	LIC 2197P/LIC 2199P	0.05/0.1	10
		LIC 4193P/LIC 4195P LIC 4197P/LIC 4199P	0.001/0.005/0.01	10
		LC 195P/LC 495P	0.001/0.01	3
		ECA 4490P	27 bits to 29 bits	7000 rpm〜550 rpm (Depends on drum size)
		RCN 2x90P/RCN 5x90P	26 bits/28 bits	1500 rpm
		RCN 8x90P	29 bit	500 rpm
	RSF Electronik	MC 15P MP/MC 15P MK	0.05/0.1	10
	Magnescale Co.,Ltd.	SR77	0.01 to 1	3.3
	Magnescale Co.,Ltd.	SR87	0.01 to 1	3.3
	MITSUBISHI HEAVY INDUSTRIES MACHINE TOOL CO., LTD	MPZA/MPRZ	23 bits	10000 r/min, 5000 r/min
	Mitutoyo Corporation	AT573-SC/AT573-H	0.05	2.5
		ST700	0.1	5
		ST1300	0.001/0.01	8
	Renishaw plc	RESOLUTE	0.001	A5/0.4, A6/4
			0.05	A5/20, A6/100
			0.1	A5/40, A6/100
Serial communication (Incremental)	Magnescale Co., Ltd.	SL700+PL101RP/RHP	0.1	10
		SL710+PL101RP/RHP	0.1	10
		SR75/SR85	0.01 to 1	3.3
		BF1	0.001/0.01	0.4/1.8
		SQ10+PQ11	0.05/0.1/0.5/1	3
		SQ10+PQ10+MQ10	0.05/0.1/0.5/1	3
	MITSUBISHI HEAVY INDUSTRIES MACHINE TOOL CO., LTD	MPLIN	0.1	30
	Nidec Sankyo Corporation	PSLH041+PSLG	0.1	6
	SIKO	MSK200/1	0.5	15

*1	There is the difference of resolution and maximum rate from the specification by original supplier as per the servo driver limitation of maximum pulse frequency. The maximum pulse frequency is 400 Mpps for A5 family and 4 Gpps for A6 series. We show the value of A6 family on this table.

	Partner	Product
	Fagor Automation, S. Coop. http://www.fagorautomation.com/en/	Enclosed Linear Encoders, Angular Encoders, Exposed Linear Encoders
	DR. JOHANNES HEIDENHAIN GmbH http://www.heidenhain.de	Absolute Exposed Linear Encoder, Absolute Angle Encoder, Absolute Linear Encoder with Scale Housing
	Magnescale Co., Ltd. http://www.magnescale.com/mgs/language/english/	Feedback Scale
	MITSUBISHI HEAVY INDUSTRIES MACHINE TOOL CO., LTD https://www.mhi-machinetool.com/en/index.html	Linear Scale, Absolute Open Type Rotary Scale
	Mitutoyo Corporation http://www.mitutoyo.co.jp/eng/	Linear Scale
	Renishaw plc http://www.renishaw.com/	Optical Absolute Linear/Rotary Encoder, Optical Incremental linear/Ring(Rotary) Encoder
	RSF Elektronik Ges. m.b.H https://www.rsf.at/	Absolute Exposed Linear encoder, Absolute Angle Encoder without Integral Bearing
	NIDEC SANKYO CORPORATION https://www.nidec.com/en/nidec-sankyo/	The incremental linear encoder of a magnetic type
	SIKO GmbH https://www.siko-global.com/	Magnetsensor