Wafer Mapping Sensor M-DW1
Discontinuation plan
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September 29, 2023 |
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The safe LED beam reflective type wafer mapping sensor
Features
Safe LEDs adopted
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Conventional laser mapping sensor that adopts laser beam has been dangerous because an operator is exposed directly to laser beam, which comes out of the load port through FOUP. We have succeeded in developing LED to adopt as light source for M-DW1. Therefore an operator's safety is ensured.
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Sensing of nitride-coated wafers possible
Nitride-coated wafers absorb light at certain wavelengths depending on the coating thickness. If the sensor uses the laser beam having a single wavelength, the beam may be absorbed completely, resulting in wafer detection error. The M-DW1 uses a LED light source with a wide wavelength band that allows to detect nitride-coated wafers successfully.
High-speed response time: 0.5 ms
The sensor responds in 0.5 ms, meeting the requirements of both high speed and high accuracy in wafer detection.
Glass wafers are also detectable
The M-DW1, which detects wafers not by the light amount but by the light position, can detect the glass wafers regardless of the light amount.
Precise position detection by 2-segment receiving element
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Wafer detection by the amount of reflected light may sometimes fail depending on the wafer edge shape. The M-DW1 uses 2-segment receiving element in the beam-receiving part, and detects wafers by the reflected light position instead of the amount of reflected light. Thus, the sensor is less affected by wafer thickness or the amount of reflected light.
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Compact and lightweight design with built-in amplifier
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The sensor measures W80.6 mm x H18.3 mm x D50 mm W3.173 in x H0.720 in x D1.969 in, and weights only 75 g approx.
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